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八十年代以来,美、日、西欧等一些国家十分重视微型机电系统(MEMS)的应用研究工作,并投入了大量人力物力,目前已取得许多成果,有成百种产品可实用或接近实用,其中有些已作为工业产品进入市场,受到全世界的瞩目。 MEMS的构成 MEMS是包括微型机构、微型传感器、微型执行器,以及信号处理和控制电路,直接接口、通讯和电源所组成的微型系统。近10年来,多种微型制造技术的发展,其中包括半导体微细加工技术、LIGA加工技术,以及各种超精
Since the 1980s, some countries such as the United States, Japan and Western Europe attach great importance to the applied research work of MEMS and have invested a great deal of manpower and resources. At present, many achievements have been made. Hundreds of products are practical or near-practical, Some of them have entered the market as industrial products, attracting worldwide attention. MEMS components MEMS is a micro-system consisting of micro-bodies, micro-sensors, micro-actuators, and signal processing and control circuits, direct interface, communication and power supply. Over the past 10 years, a variety of micro-manufacturing technology development, including semiconductor micro-processing technology, LIGA processing technology, and a variety of ultra-fine