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在简述无极光源发明史的基础上,介绍了等离子体无极光源的分类和特点,重点讨论“高频电感耦合等离子体无极光源”的结构特性和应用发展。
On the basis of the brief introduction of the invention history of the non-polar light source, the classification and characteristics of the plasma non-polar light source are introduced, and the structural characteristics and application development of the “high frequency inductively coupled plasma electrodeless light source” are mainly discussed.