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采用液相电化学沉积技术制备了ZnO纳米颗粒掺杂的类金刚石(DLC)薄膜,研究了ZnO纳米颗粒掺杂对DLC薄膜场发射性能的影响.利用X射线光电子能谱、透射电子显微镜、Raman光谱以及原子力显微镜分别对薄膜的化学组成、微观结构和表面形貌进行了表征.结果表明:薄膜中的ZnO纳米颗粒具有纤锌矿结构,其含量随着电解液中Zn源的增加而增加.ZnO纳米颗粒掺杂增强了DLC薄膜的石墨化和表面粗糙度.场发射测试表明,ZnO纳米颗粒掺杂能提高DLC薄膜的场发射性能,其中Zn与Zn+C的原子比为10.3%的样品在外加电场强度为20.7 V/μm时电流密度达到了1 mA/cm~2.薄膜场发射性能的提高归因于ZnO掺杂引起的表面粗糙度和DLC薄膜石墨化程度的增加.
DLC films doped with ZnO nanoparticles were prepared by liquid-phase electrochemical deposition technique and the effects of ZnO nanoparticles doping on the field emission properties of DLC thin films were investigated by X-ray photoelectron spectroscopy, transmission electron microscopy, Raman Spectra and atomic force microscopy were used to characterize the chemical composition, microstructure and surface morphology of the films respectively. The results show that the ZnO nanoparticles have wurtzite structure and their content increases with the increase of Zn source in the electrolyte. ZnO nanoparticle doping enhanced the graphitization and surface roughness of DLC films.Field emission experiments showed that ZnO nanoparticles doping can improve the field emission properties of DLC films, in which the Zn and Zn + C atomic ratio of 10.3% of the sample The current density reached 1 mA / cm ~ 2 at an applied electric field of 20.7 V / μm. The improvement of the field emission properties of the films is attributed to the increase of the surface roughness due to the ZnO doping and the graphitization of the DLC films.