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上海第三代同步辐射光源(SSRF)的动态真空要求为1.3×10-7Pa,要获得这样的超高真空环境,真空系统配置了多台钛升华泵(TSP)和非蒸散型吸气剂(NEG)组件,针对这两种设备的工作参数,研制了一种带有计算机通信接口的复合电源,并在LabVIEW环境下开发了一套相应的控制软件,实现了对TSP和NEG的本地和远程控制。经过测试,该控制器和控制软件均已达到了设计指标,可以正式投入到上海光源项目上使用。
The dynamic vacuum requirement of Shanghai’s third-generation synchrotron light source (SSRF) is 1.3 × 10-7 Pa. To achieve such an ultra-high vacuum environment, the vacuum system is equipped with multiple titanium sublimation pumps (TSPs) and non-evaporable getters NEG) components. According to the working parameters of these two devices, a composite power supply with computer communication interface was developed. In the LabVIEW environment, a set of corresponding control software was developed to realize the TSP and NEG local and remote control. After testing, the controller and control software have reached the design specifications, can be formally put into use on the Shanghai Light Project.