分子束外延是七十年代初在真空蒸发外延的基础上发展起来的一种新的外延技术.它是把要蒸发的外延物质,放在喷射炉中,在10-10托以上超高真空的喷射室内加热,使物质蒸发.蒸气分子从喷射炉的小孔射出,成为分子束,直接在保持有一定温度的衬底上淀积(见图1). 从分子一个一个地粘附在 Molecular beam epitaxy is a new epitaxial technique developed on the basis of vacuum evaporation epitaxy in the early seventies.It is the epitaxial material to be evaporated, placed in a spray furnace, ultra-high vacuum above 10-10 torr The interior of the spray chamber is heated to allow the material to evaporate, and the vapor molecules exit the orifice of the spray furnace and act as molecular beams, deposited directly on the substrate at a certain temperature (see Figure 1)