离子束刻蚀机的性能,除主机外,在很大程度上取决于供电电源系统。为了提高离子束刻蚀机整机工作的稳定性,在以往的配套电源的基础上,研制了一套电源系统,用于离子束刻蚀机中。整机工作稳定度达±0.8%/h,每次连续刻蚀器件8h以上,连续运转3年多,电源系统稳定可靠。是国内离子束刻蚀机电源系统性能较好的供电电源系统。 Ion beam etching machine performance, in addition to the host, depends largely on the power supply system. In order to improve the stability of the work of ion beam etching machine machine, based on the previous supporting power, developed a power system for ion beam etching machine. Machine stability of ± 0.8% / h, each continuous etching device 8h above, continuous operation for more than 3 years, the power system is stable and reliable. Is the ion beam etching machine power system performance better power supply system.