扫描投影光刻机主要由光学系统与工件台系统等组成.目前工件台所用的导轨主要有滑动导轨、滚珠导轨、液压导轨、气浮导轨等,其中以气浮导轨运动精度为最佳.精密气浮工件台是扫描投影光刻机的重要组成部分,工件台与扫描架联接在一起,直接影响扫描精度,而扫描精度又直接影响光刻机的分辨本领与套准精度.为了研制能刻划1.5μm Scanning projection lithography is mainly composed of optical system and workpiece table system etc. At present, the guide rails used on the workpiece table are mainly sliding guide rails, ball guide rails, hydraulic guide rails and air-floating guide rails, among which the precision of air-floating guide rails is the best. The flotation workbench is an important part of the scanning projection lithography machine. The workbench and the gantry are connected together, which directly affects the scanning accuracy. The scanning accuracy directly affects the resolving power and register accuracy of the lithography machine. Draw 1.5μm