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揭示了真空室压力随离子源放电电流增长,而且在不同的气流速率时的增长率不同这一现象,并对其机理进行了分析,认为真空室压力随放电电流的增长主要是离化粒子束流密度的增长引起的,当然离化粒子的平均能量的增长也起了作用,而在不同气流速率时该压力增长率的不同则主要是因为在不同的气流速率时离化率不同。
The phenomenon that the pressure in the vacuum chamber increases with the discharge current of the ion source and the rate of increase at different air flow rates is revealed and the mechanism is analyzed. It is concluded that the increase of pressure in the vacuum chamber with the increase of the discharge current is mainly due to the ionized particle beam Of course, the increase of the average energy of the ionized particles is also caused by the increase of the flow density, and the difference of the rate of pressure increase at different gas flow rates is mainly due to the different ionization rates at different gas flow rates.