三层结构逻辑是注入逻辑的一种改进型,它采用NPNM四极管,从而降低了逻辑摆幅,存贮电荷也比较小,因此,在速度上就较注入逻辑为高。但在工艺上仍具有注入逻辑的特点,即工艺简单、易控、成品率较高、并采用无金工艺。本试验仅涉及常规工艺,已应用于五级门、九级闭环振荡及四位加法器,并对工艺过程中出现的一些问题作了一些必要的试验。 Three-layer structure logic is an improved injection logic that uses NPNM tetrodes to reduce the logic swing and store charge relatively small, so it is faster than the injection logic. However, the process is still characterized by logic injection, that is, process is simple, easy to control, high yield, and the use of gold-free process. This test only involves conventional technology, has been applied to the five-door, nine-stage closed-loop oscillation and four adders, and some of the problems occurred in the process of making some necessary tests.