引言在一九七二年的国际固态电路会议上,有两篇论文讨论了一种新型的双极型逻辑电路。这种电路中把多收集极的纵向N-P-N晶体管作为反相器,而把横向P-N-P晶体管电流源作为负载。这种新颖的逻辑叫做集成注入逻辑(Integrated Injection Logic(I~2L)),或者叫做兼饼晶体管逻辑(Merged Transistor Logic(MTL))。这种电路在小的和中等的电流下,封装密度高,速度-功率乘积小。在具有低速度-功率乘积的I~2L门方面和在I~2L的片子上还含有其它类型的逻辑和模拟电路方面又获得了进一步的发展。本文专门讨论I~2L门工艺的现状。在简短地叙述I~2L的基本结构以后,将介绍生产低速 INTRODUCTION At the International Solid State Circuits Conference in 1972, two papers discussed a new type of bipolar logic circuit. This circuit uses a multi-collector longitudinal N-P-N transistor as an inverter and a lateral P-N-P transistor current source as a load. This new type of logic is called Integrated Injection Logic (I ~ 2L), or Merged Transistor Logic (MTL). This circuit in the small and medium current, high packing density, speed - power product is small. Further developments have been made in I ~ 2L gates with low speed-power products and in other types of logic and analog circuits on I ~ 2L chips. This article devoted to the status of I ~ 2L door technology. After a brief description of the basic structure of I ~ 2L, will introduce the production of low speed