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为解决光学系统中普遍存在的菲涅耳反射问题 ,利用严格耦合波法设计、分析了一种三维轮廓亚波长结构 ,然后把计算结果同多层反射膜的增透特性进行了比较 ,结果表明该结构在很宽的波段上尤其是远红外波段上的抗反射特性要远远好于多层膜 ,其反射率基本上能控制在 0 .2 %以内 ;并且这种结构反射率的变化随入射光波入射角的偏离在 4 0°以内能保持在 1 %以下 ,而多层膜只能在 30°以内勉强做到这一点。
In order to solve the problem of Fresnel reflection commonly existing in optical systems, a three-dimensional contour subwavelength structure is designed and analyzed by using a rigorous coupled wave method. The calculated results are compared with that of multilayer reflective films. The results show that The anti-reflective property of this structure is much better than multi-layer film in a wide band, especially in the far infrared band, and its reflectivity can be basically controlled within 0.2%; and the change of the reflectivity Incidence of incident light incident angle deviation within 4 0 ° can be maintained below 1%, while the multilayer film can only be within 30 ° barely do this.