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追述了薄膜淀积技术的历史,按照制备手段对MEMS制造中使用的各种薄膜制造技术进行了大致的分类和对比,介绍了相应的理论研究概况,除了电镀技术之外,MEMS技术基本来自传统的IC制造工艺。
The history of the thin film deposition technology is traced back. The various thin film manufacturing technologies used in MEMS manufacturing are roughly classified and compared according to the preparation methods. The corresponding theoretical research overview is introduced. In addition to the electroplating technology, the MEMS technology basically comes from the traditional IC manufacturing process.