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由于目前的微塑性成形技术存在尺寸效应、成形不均匀、加工效率低、成本高、污染环境等问题,讨论并研究了一种新的微成形方法—激光层裂微成形技术。建立了理论模型分析研究在激光驱动飞片加载下薄膜与基体层裂及薄膜微成形的影响因素,设计并完成了实验,考察了激光能量、薄膜厚度及薄膜种类对激光层裂微成形的影响。研究发现,该技术可以实现薄膜微成形,激光能量大小及薄膜的种类是影响薄膜与基体层裂的关键因素,一定范围内薄膜厚度对薄膜成形影响较小,但是超出其范围对薄膜成形将有重要影响作用。因此,激光层裂微成形是具有应用前景的可控制与可操作的薄膜微成形技术。
Due to the existence of size effect, uneven forming, low processing efficiency, high cost and environmental pollution, the current micro-plastic forming technology has discussed and researched a new micro-forming method-laser micro-forming. The influence of laser energy, film thickness and type of film on the micro-forming of the laser layer was investigated. The influence of laser energy, film thickness and film type on the micro-forming of the laser film was studied. . It is found that this technique can achieve film micro-forming. The laser energy and the type of film are the key factors affecting the film-substrate cracking. Within a certain range, film thickness has little effect on film forming. However, beyond its range, film forming will have Important impact. Therefore, laser delaminated micro-forming is a controllable and operable thin film micro-forming technology with potential applications.