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采用石英晶体热敏新切型(ZY切型)和音叉结构,设计了一种工作于弯曲振动模式,输出为频率信号的数字温度传感器。针对温度传感器的要求,对石英晶体双旋切角的频率温度特性和机电耦合系数进行分析,确定热敏切型,使其具有较高的频率温度系数和机电耦合系数。对石英音叉结构和振动模式进行有限元仿真分析,优化传感器结构,并采用微机械加工技术制作音叉。实验结果表明,该传感器谐振频率对温度极其敏感并具有良好的频率温度线性关系,在0°C到100°C的测温范围内,频率温度系数为70×10~(-6)°C~(-1),分辨力为0.002°C,测温精度为±0.05°C,低功耗小于0.03μw。
Using quartz crystal thermal cutting (ZY cut type) and tuning fork structure, a digital temperature sensor working in bending vibration mode and outputting as frequency signal was designed. According to the requirement of temperature sensor, the frequency temperature characteristic and electromechanical coupling coefficient of double crystal drop angle of quartz crystal were analyzed to determine the thermal cutting pattern, which made it have higher frequency temperature coefficient and electromechanical coupling coefficient. The finite element simulation analysis of quartz tuning fork structure and vibration mode is carried out, the sensor structure is optimized, and the tuning fork is fabricated by micromachining technology. The experimental results show that the resonant frequency of the sensor is extremely sensitive to temperature and has a good frequency-temperature linearity. The temperature coefficient of frequency is within the range of 70 × 10 -6 -6 ° C within the temperature range of 0 ° C to 100 ° C. (-1), resolution of 0.002 ° C, temperature measurement accuracy of ± 0.05 ° C, low power consumption of less than 0.03μw.