石英微透镜列阵的制造和测量１．引言几个研究人员已报导了用光致抗蚀剂熔融控制法的微透镜制造。１９８４年，Ｗａｄａ［１］讨论了在ＩｎＰ发光二极管上用光致抗蚀剂熔融，随后进行离子束蚀刻的单个微透镜的制造。Ｐｏｐｏｖｉｃ等［２］在ＳｉＯ２晶片上制作了光致抗蚀... Manufacture and measurement of quartz microlens array 1. Introduction Several researchers have reported the fabrication of microlenses using a photoresist melt control method. In 1984, Wada [1] discussed the fabrication of individual microlenses fused with a photoresist on an InP light-emitting diode followed by ion beam etching. Popovic et al [2] fabricated photoresist on SiO2 wafers.