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分析了声表面波(SAW)叉指换能器(IDT)中波的传播问题。从产生SAW的静电荷分布出发,结合压电材料的各向异性,推导出了叉指上SAW的电势分布及波角谱表达式,引入了波传播损耗因子与修正脉冲响应函数。对具带通频率响应的加权SAW-IDT进行了模拟计算,包括波传播损耗因子与叉指声孔径大小及相互间距离的关系,修正脉冲响应及其频率响应,波传播对等效电路模型参数的影响。最后得到结论。
The propagation of waves in surface acoustic wave (SAW) interdigital transducers (IDTs) was analyzed. Based on the static charge distribution of SAW and the anisotropy of piezoelectric material, the potential distribution and the wave angle spectrum expression of SAW on the interdigital transducer are deduced. The wave propagation loss factor and the modified impulse response function are introduced. The weighted SAW-IDT with band-pass frequency response is simulated, including the relationship between the wave propagation loss factor and the size of the interdigital acoustical aperture and the distance between them, the correction of the impulse response and its frequency response, the effect of wave propagation on the equivalent circuit model parameters Impact. Finally, the conclusion.