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光学镀膜宽带监控的判停依靠测量曲线和理论曲线的吻合程度来进行,这要求对理论曲线进行符合薄膜镀制实际的修正。在介绍光学镀膜宽带监控技术的原理及现状的基础上,针对由于材料的吸收而产生的测量曲线和理论曲线的严重背离,提出了一种逐层修正的方法。试验结果表明,其效果良好,完全可以满足实际镀膜的需要。
The determination of optical coating broadband monitoring depends on the agreement of the measured curve with the theoretical curve, which requires the theoretical curve to be corrected in line with the actual film plating. On the basis of introducing the principle and current situation of optical coating broadband monitoring technology, a method of layer-by-layer correction is put forward in view of the serious departure from the measured curve and the theoretical curve caused by the material absorption. Test results show that the effect is good, can fully meet the needs of the actual coating.