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本文着重介绍了扫描电化学显微技术(SECM)的工作原理、仪器构造和测量方法,简要地评述了SECM在电化学研究及表面微加工等方面的应用及发展前景。
This paper focuses on the working principle, instrumentation and measurement methods of SECM, and briefly reviews the application and development prospects of SECM in electrochemical research and surface micromachining.