论文部分内容阅读
提出了一种弧形齿面蚀刻衍射光栅波长路由器,通过合理设计齿面形状,可以同时提高器件的损耗均匀特性和频谱通带带宽。设计了基于InP平台,中心波长1550nm,通道间隔400GHz的4×4波长路由器。仿真结果显示,各通道之间的损耗差异可由8.1dB减小到0.8dB,频谱响应形状为平顶,1dB带宽由0.3nm增加到1.6nm,并可以通过调整设计参数,平衡器件的损耗均匀程度、带宽和整体损耗。实验结果显示,各通道间差异为3.1dB,1dB带宽约为1.1nm,器件串扰低于-12dB,验证了该方法的正确性。该方法无需增加器件尺寸或引入额外结构,可应用于任何材料平台的蚀刻衍射光栅器件。
An arc-shaped tooth surface diffraction grating wavelength router is proposed. By properly designing the shape of the flanks, it is possible to improve the loss uniformity characteristics and the bandwidth of the spectrum passband simultaneously. A 4 × 4 wavelength router based on InP platform with center wavelength of 1550nm and channel spacing of 400GHz was designed. The simulation results show that the difference between each channel loss can be reduced from 8.1dB to 0.8dB, the shape of the spectral response is flat top, 1dB bandwidth increased from 0.3nm to 1.6nm, and the design parameters can be adjusted to balance the device loss uniformity , Bandwidth and overall loss. Experimental results show that the difference between each channel is 3.1dB, 1dB bandwidth of about 1.1nm, device crosstalk is lower than-12dB, verify the correctness of the method. This method can be applied to etched diffraction grating devices of any material platform without increasing device size or introducing extra structure.