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5. A Parametric Study of Mechanical Cross-Coupling in Parallel-Kinematics Piezo-Flexural Nano-Positioni

A Parametric Study of Mechanical Cross-Coupling in Parallel-Kinematics Piezo-Flexural Nano-Positioni

来源 :应用科学(英文) | 被引量 : 0次 | 上传用户：chuengwang

【摘 要】

：

Piezo-electric nano-positioning stages are being widely used in applications in which precision and accuracy in the order of nano, and high scanning speeds are

【作 者】

：

Abbas Shafiee Amirhossein Ahmadian Amin Akbari 

【机 构】

：

SchoolofMechanicalEngineering,DepartmentofMechanicalandAerospaceEngineering

【出 处】

：

应用科学(英文)

【发表日期】

：

2021年5期

【关键词】

：

Nano-Positioning Stages Piezoelectric Actuators Mechanical Cross-Coupling Finite 

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Piezo-electric nano-positioning stages are being widely used in applications in which precision and accuracy in the order of nano, and high scanning speeds are paramount. This paper presents a Finite Element Analysis (FEA) of the parallel piezo-flexural n

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