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用热丝CVD法，以甲烷和氢气为气源，制备出了优质的金刚石薄膜。研究了沉积工艺参数对金刚石薄膜形貌的影响。结果表明：降低碳源浓度或升高衬底温度，沉积的金刚石薄膜呈现以三角形为主的形貌；反之，沉积的金刚石薄膜则呈现以四方形为主的形貌。
Hot filament CVD method to methane and hydrogen gas source, prepared a high-quality diamond film. The effects of deposition parameters on the morphology of diamond films were investigated. The results show that diamond films deposited in the form of triangle are the main features of the films when the concentration of carbon source is decreased or the substrate temperature is increased. On the contrary, the deposited diamond films are mainly tetragonal.