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为了获得具有一定厚度的四面体非晶碳薄膜,利用过滤阴极真空电弧(FCVA)沉积技术,通过交替改变衬底偏压的方法制备了多层四面体非晶碳(ta-C)薄膜。多层膜由富sp2子膜层Ai与富sp3子膜层Bi交替组成(i=1,2,3),各子膜层厚度比dAi/dBi约为1.0,总的膜厚约为1μm。根据Stoney公式计算多层膜的各子膜层压应力呈交替起伏变化。多层四面体非晶碳膜在500℃以下的真空退火处理后,可见光Raman谱表明,多层膜的富sp3杂化结构基本保持不变,纳米压痕测量的薄膜硬度与杨氏模量略微增加,纳米划擦实验表明,多层膜具有优良的耐磨性与附着性。因此,多层ta-C膜具有优良的力学性能和热稳定性,是一种优异的航空航天用光学元件的表面保护膜。
In order to obtain a tetrahedral amorphous carbon film with a certain thickness, a multilayer tetrahedral amorphous carbon (ta-C) film was prepared by alternately changing the substrate bias using a filtered cathode vacuum arc (FCVA) deposition technique. The multi-layer film is composed of ap-rich sp2 sub-layer Ai and sp3-rich sub-layer Bi (i = 1, 2, 3). The thickness ratio dAi / dBi of each sub-layer is about 1.0. According to Stoney’s formula, the laminar stress of each sub-film of the multi-layer film is changed alternately. The multilayer Raman spectra of multi-layer tetrahedral amorphous carbon films annealed below 500 ℃ showed that the multi-layered films have almost the same sp3 hybrid structure, and the film hardness and Young’s modulus measured by nanoindentation are slightly Increase, nano-scratch experiments show that the multilayer film has excellent wear resistance and adhesion. Therefore, multi-layer ta-C film has excellent mechanical properties and thermal stability, is an excellent aerospace optical components surface protection film.