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本文介绍的筒状蒸发源，可以获得大面积的均匀膜厚分布．采用迭代法计算的相对膜厚分布和用干涉法测量的相对膜厚分布能较好地符合。相对偏差可＜０．３％。
This article describes the cylindrical evaporation source, you can get a large area of uniform thickness distribution. The relative film thickness distribution calculated by the iterative method and the relative film thickness distribution measured by the interference method are in good agreement. The relative deviation can be <0.3%.