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本文以Al2O3/TiCN多层CVD涂层为研究对象,采用EBSD分析Al2O3/TiCN涂层晶粒生长方式和取向结构。Al2O3晶粒间多为大角度晶界;TiCN晶粒在平行和垂直于晶粒生长方向上分别形成带顶尖锥体结构和棱形结构晶粒对,中心线均为60°<111>孪晶界,即Σ3晶界,分别占TiCN涂层晶界的27.3%和28.2%。基于EBSD数据,利用截距法分析了Al2O3及TiCN晶粒横向生长变化趋势,随着涂层的生长,Al2O3晶粒约长大二倍,呈喇叭型生长,晶粒数量不断减少,而TiCN晶粒在0.24~0.36μm范围内呈纤维状生长,具有明显的长径比。EBSD反极图显示TiCN具有<111>方向织构,Al2O3具有接近<0001>方向织构,而采用XRD方法计算TiCN和Al2O3涂层在宏观上分别具有{111}和{0112}方向织构。
In this paper, Al2O3 / TiCN multi-layer CVD coating is taken as the research object, and the grain growth mode and orientation structure of Al2O3 / TiCN coating are analyzed by EBSD. The grains of Al2O3 are mostly large-angle grain boundaries. The TiCN grains form a pair of crystal grains with top cone structure and prismatic structure respectively in parallel and perpendicular to the grain growth direction, the center lines are both 60 ° <111> twins The boundary, Σ3 grain boundary, accounts for 27.3% and 28.2% of the grain boundaries of the TiCN coating, respectively. Based on the EBSD data, the transverse growth trend of Al2O3 and TiCN grains was analyzed by intercept method. With the growth of the coating, Al2O3 grains grow about twice and grow in a horn shape with the number of grains decreasing, while the TiCN grains The grains grew fibrously in the range of 0.24-0.36μm with obvious aspect ratio. The EBSD inverse pole diagram shows that TiCN has a texture of <111> orientation and Al2O3 has a texture near <0001> direction. The XRD method is used to calculate the texture of TiCN and Al2O3 coatings in the macro direction of {111} and {0112}, respectively.