论文部分内容阅读
,Electrical characterization of integrated passive devices using thin film technology for 3D integra
【机 构】
：
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beij
【出 处】
：
浙江大学学报（英文版）（C辑：计算机与电子）
【发表日期】
：
2013年4期
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