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文中概述了动态累积法检漏的装置和应用,给出了这种方法检测微小漏孔漏量值的计算公式;并进一步证明了应用这种检漏方法可以使仪器的最小可检量提高两个数量级以上。这种检漏方法的基本原理是利用了氦气在试件内的“累积”和检漏仪对氦气的“选择性”。应用动态累积法检漏,对陶瓷-金属封接件以及同类型的微小漏孔和渗漏的零、部件来说,提供了良好的检测手段。实践证明,这种方法不但检漏灵敏度高;而且还能够可靠地确定漏孔的漏量和部位,从而提高了密封器件的真空密封性能。因此,对检测微小漏孔很有实用价值。
In this paper, the device and application of dynamic cumulative leak detection are summarized, and the formula for detecting the leak value of the tiny leaks is given. It is further proved that the minimum detectable amount of the instrument can be increased by two An order of magnitude above. The basic principle of this leak detection method is to make use of the “accumulation” of helium in the test piece and the “selectivity” of helium by the leak detector. Application of dynamic cumulative leak detection, ceramic - metal seals and the same type of tiny leaks and leakage of zero, components, provides a good means of detection. Practice has proved that this method not only high sensitivity test; but also to reliably determine the amount of leakage hole leakage and parts, thereby enhancing the vacuum sealing performance of the sealing device. Therefore, the detection of tiny holes is of great practical value.