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微机电系统(MEMS)推动了红外焦平面阵列(FPA)技术的发展,使红外热像仪的性能和精度得到了很大的提高。红外焦平面阵列按照其工作原理、结构形式、制冷方式和成像方式的不同分为各种类型,比较并分析了各类型红外焦平面阵列间的不同点和各自特点。着重介绍了红外焦平面阵列技术最新研究热点中的光量子类红外焦平面阵列和双色、多色红外焦平面阵列,以及近些年它们在国内外最新的研究成果。最后讨论了红外焦平面阵列技术的发展趋势。
MEMS (Micro-Electro-Mechanical Systems) has driven the development of infrared focal plane array (FPA) technology that has greatly improved the performance and accuracy of thermal imaging cameras. Infrared focal plane array is divided into various types according to its working principle, structure, cooling mode and imaging mode, and compares and analyzes the different points and their respective characteristics among various types of infrared focal plane arrays. Emphasis is put on the light quantum infrared focal plane arrays and two-color and multi-color infrared focal plane arrays in the latest research hot spots of infrared focal plane array technology. In recent years, the latest research results at home and abroad are introduced. Finally, the development trend of infrared focal plane array technology is discussed.