TiO2 films,showing superhydrophilic behavior,are prepared by electron beam evaporation.Atomic force microscopy and the contact angle measurement were performed to characterize the morphology and wetting behavior of the TiO2 films.Most studies attribute the wetting behavior of TiO2 surfaces to their physical characteristics rather than surface chemistry.These physical characteristics include surface morphology,roughness,and agglomerate size.We arrange these parameters in order of effectiveness.Surface morphologies are demonstrated to be the most important.TiO2 films with particular morphologies show superhydrophilic behavior without exteal stimuli,and these thin films also show stable anti-contamination properties during cyclical wetting and drying.