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基于表面等离激元(SPP)的表面波等离子体(SWP)源,具有高密度、低温度及高产率等优异性能,其应用在电子器件微纳加工、材料改性等领域.但由于SPP激励SWP放电的电离过程难于用理论分析和实验测量描述,因而SWP源均匀稳定产生的电离发展过程一直未研究清晰.本文以SWP放电的数值模拟为研究手段,采用等离子体与电磁波相互作用的粒子模拟(PIC)方法,结合蒙特卡罗碰撞(MCC)方法处理碰撞效应的优势,研究气体压强影响电离过程的电磁能量耦合机理.模拟结果表明SWP的高效产生是SPP的局域增强电场致使,气体压强能够改变波模共振转换的出现时刻而影响了SWP的电离发展过程.本文的研究成果展示了SPP维持SWP放电的电离过程,可为下一代米级SWP源的参数优化提供设计建议.
Surface Plasmon Excitation (SPP) -based surface wave plasma (SWP) sources have excellent properties such as high density, low temperature and high yield, and are used in the fields of micro / nano processing of electronic devices, material modification, etc. However, The ionization process of stimulated SWP discharge is difficult to describe with theoretical analysis and experimental measurement, so the development of ionization generated by uniform and stable SWP source has not been studied clearly.With the SWP discharge numerical simulation as the research method, the interaction between plasma and electromagnetic wave (PIC) and Monte Carlo collision method (MCC) to deal with the advantage of collision effect, the mechanism of gas pressure affecting the electromagnetic energy coupling process in ionization process is studied.The simulation results show that the high efficiency of SWP is caused by the local enhanced electric field of SPP, The pressure can change the appearance moment of mode resonance conversion and affect the ionization process of SWP.The research results of this paper show that SPP can maintain the ionization process of SWP discharge and provide the design suggestion for the parameter optimization of the next generation of meter SWP source.