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历史的回顾用手指触摸物体表面,通过人体感觉器官来判断表面的平整度,这是人们在日常生活中经常采用的一种方法。但如果用一根金属细针作为探针,利用某种电信号随物体表面的起伏而变化来描述表面的状态或表面的粗糙程度,这就成了一种非常有用的科学仪器。早在1971年,美国国家标准局(NBS)的杨(R.D.Young)就发明了一种采用非接触的探针方法、利
Historical Review Touch the surface of the object with your fingers to judge the flatness of the surface through the human sensory organs, which is one of the most commonly used methods in daily life. However, if a fine metal needle is used as a probe, the state of the surface or the roughness of the surface can be described by using an electrical signal that varies with the undulation of the surface of the object, which becomes a very useful scientific instrument. As early as 1971, R. D Young of the National Bureau of Standards of the United States invented a non-contact probe method