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本文对电迁徙参数电流密度因子n及n值的精确测量技术进行了深入研究．首次提出了动态电流斜坡电流密度因子测试法（DCR）．该方法与传统的MTF法不同，能精确控制金属条温，消除了高电流密度条件下焦耳热的影响，提高了n值的测量精度与速度．研究了四种不同样品直流和脉冲条件下的n值．实验结果表明，n值与材料、频率、占空比有关，与温度、一定范围内的电流密度无关．
In this paper, the accurate measurement techniques of current density factor n and n of electromigration parameters are studied in depth. The dynamic current ramping current density factor test (DCR) is first proposed. Compared with the traditional MTF method, the method can precisely control the temperature of the metal strip, eliminates the influence of Joule heat under high current density, and improves the measurement precision and speed of the n value. The n values under four different samples DC and pulse conditions were investigated. The experimental results show that the value of n is related to the material, frequency and duty cycle, and is independent of the temperature and the current density within a certain range.