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对TiN、TiC、TiB2为代表的钛系化合物薄膜的制备方法、力学性能及研究现状做了综述,并对其发展趋势做了展望。
The preparation methods, mechanical properties and research status of TiN, TiC and TiB2 films are reviewed. The development trend of the films is also reviewed.