论文部分内容阅读
ＢＧ－１０１Ｊ分步光刻机检测记录（四）曝光系统照明条件检测一、测试仪器名称：自检软件仪器精度：相对比较日期：９４．１２．９型号：温度：２０．５℃测试人：杨顺二、照明不均匀性计算方法三、测试结果平均光强：３３０ｍＷ／ｃｍ￣２照明不均匀性：……＜０２．６...
BG-101J Stepper Lithography Test Record (D) Detection of exposure system lighting conditions First, the name of the test equipment: Self-test software Instrument Accuracy: The relative comparison date: 94.12.9 Model: Temperature: 20.5 ℃ Person: Yang Shun II, illumination unevenness calculation method Third, the test results Average light intensity: 330mW / cm ~ 2 Lighting inhomogeneity: ...... <02.6 ...