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通过对熔石英表面和亚表面划痕的原位测量,研究划痕的表面均方根(RMS)粗糙度、宽度和深度在HF溶液中刻蚀不同时间后的变化规律,测试了不同刻蚀时间下熔石英的损伤阈值。实验结果表明:随刻蚀时间的增加,表面RMS、划痕深度及宽度的总体变化趋势是增加的;熔石英的损伤阈值随刻蚀时间的增加,在1～10min时间段呈增加趋势,在20～40 min时间段呈下降趋势,而在60～120 min时间段先增加后降低。综合熔石英划痕的微观形貌损伤阈值的测量结果认为,刻蚀10 min时效果最佳。
The in-situ measurements of surface and subsurface scratches on fused silica were carried out to study the variation of root mean square (RMS) roughness, width and depth of scratches after etching in HF solution for different time. Different etching The damage threshold of fused silica at time. The experimental results show that with the increase of etching time, the overall trend of surface RMS, scratch depth and width is increased. The damage threshold of fused silica increases with the increase of etching time, 20 ~ 40 min time period showed a downward trend, while in the 60 ~ 120 min time period first increased and then decreased. The results of measuring the damage threshold of the fused silica scratches show that the best effect is obtained at 10 min etching.