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以紫铜为基体,采用热丝CVD法合成金刚石薄膜,研究了钛过渡层及研磨金刚石粉(俗称“种植晶仔”)预处理对金刚石薄膜生长状态的影响。用X射线(XRD)、拉曼光谱、扫描电镜(SEM)对所沉积的金刚石薄膜进行了研究。研究发现:活性钛金属过渡层有利于金刚石的形核,而且也提高了成膜质量;“种植晶仔”预处理有利于金刚石形核,而且减少了非晶碳的形成。
The copper thin film was synthesized by hot filament CVD method using copper as substrate, and the effect of pretreatment with titanium transition layer and ground diamond powder on the growth of diamond films was studied. The deposited diamond films were characterized by X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscopy (SEM). It is found that the active titanium transition layer is good for the nucleation of diamond and also improves the quality of the film formation. “Implantation of crystal ” pretreatment is conducive to diamond nucleation, and reduce the formation of amorphous carbon.