论文部分内容阅读
自由电子激光(Free Electron Laser,FEL)装置是一种以相对论高品质电子束作为工作介质,在周期磁场中以受激发射方式放大电磁辐射的新型激光源。FEL装置中的四极铁中心相对于束流中心线的高精度就位与否将直接影响束流的品质,上海软X射线自由电子激光装置和大连极紫外相干光源装置的波荡器段间四极铁均采用基于束流准直方法(Beam based alignment,BBA),需要可远程精密调节四极铁位置的机构。BBA四极铁远程精密调节机构主要由可远程精密定位的电移机构和控制系统构成。电移机构采用精密滚珠丝杠驱动的滑块组合机构,可实现垂直于束流的水平和竖直高度方向的二维调节。本文简单描述了BBA四极铁远程精密调节机构的机械设计,对BBA四极铁远程精密调节机构的测试方法及结果进行了详细分析。该系统集成测试结果表明,机构运动过程中采用光栅尺进行反馈,其定位精度和重复性均达到了设计指标要求。
The Free Electron Laser (FEL) device is a new type of laser source that uses relativistic high-quality electron beam as a working medium to amplify electromagnetic radiation by stimulated emission in a periodic magnetic field. FEL device in the center of the quadrupole relative to the beam centerline in place or not will have a direct impact on the quality of the beam current, Shanghai soft X-ray emission electron beam device and Dalian EUV coherent light source device between four Poles are based on Beam based alignment (BBA), a mechanism that requires precise remote adjustment of the quadrupole position. BBA quadrupole remote precision adjustment mechanism mainly by the remote precision positioning of the electric displacement mechanism and control system. The movement mechanism uses a precision ball screw-driven slider combination mechanism that enables two-dimensional adjustment of the horizontal and vertical height of the beam perpendicular to the beam. This article briefly describes the mechanical design of BBA quadrupole remote precision adjustment mechanism, and analyzes the test methods and results of BBA quadrupole remote precision adjustment mechanism. The system integration test results show that the mechanism used in the process of grating feedback, its positioning accuracy and repeatability have reached the design requirements.