这种测量方法涉及到微波与光感载流子之间的相互作用及由此而产生的能量传递。这种能量传递可以为测试信号提供无触点通道。简而言之,这是一种类似于雷达的测试方法,即反射信号受光的影响。用此种方法有三种测试可能性。1.使用瞬时激光脉冲进行时间分辨的测量。2.位置分辨的测量,进行这种测量时激光束在半导体材料(如微型芯片)表面上扫描。 This measurement method involves the interaction between microwaves and photo-induced carriers and the resulting energy transfer. This energy transfer provides a non-contact passage for the test signal. In short, this is a radar-like test method where the reflected signal is affected by light. There are three test possibilities in this way. 1. Time-resolved measurements using instantaneous laser pulses. 2. Position-resolved measurement, where the laser beam is scanned over the surface of a semiconductor material (such as a microchips).