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为满足对振动环境下10Hz以下低频小量程加速度信号的高精度测量需求,设计一种具有窄带宽特点的新型石英MEMS加速度计敏感元件。敏感元件采用变间距式差分电容梳齿结构,基于石英微工艺制作。采用有限元分析手段,对敏感元件质量块尺寸、梳齿长度、梁刚度、止挡与盖板结构等参数进行综合优化设计。仿真结果显示,敏感元件带宽8.9Hz,止挡与盖板结构可以有效提升抗过载及振动能力,设计可以满足飞行器振动环境下小量程低频加速度参数测量需求。
In order to meet the requirement of high-precision measurement of low frequency and small range acceleration signals below 10Hz in vibration environment, a novel quartz MEMS accelerometer sensor with narrow bandwidth is designed. Sensitive components using variable pitch differential capacitor comb structure, based on quartz micro-technology production. Finite element analysis is used to optimize the design parameters such as mass size, comb tooth length, beam rigidity, stop and cover structure. The simulation results show that the bandwidth of sensitive element is 8.9Hz, the structure of stop and cover can effectively improve the anti-overload and vibration ability, and the design can meet the requirement of small-range and low-frequency acceleration parameter measurement in the vibration environment of aircraft.