论文部分内容阅读
干涉仪是灵敏度和准确度都很高的一种仪器。因此,在精密测量中,特别是高精度的自动化测量中(例如测量量块),人们自然就想到用白光干涉条纹来作为定位信号。用一光电元件接收白光干涉条纹信号,通过电路处理,取出零次干涉条纹的顶点即可作为定位信号。要准确地、不加鉴别地取出各次干涉条纹的顶点是容易的,但是要从达一组顶点信号中鉴别出哪一个顶点信号对应零次干涉条纹,这却是十分困难的事情。我们为此作了许多工作,
Interferometers are instruments of high sensitivity and accuracy. Therefore, in precision measurement, especially high-precision automated measurement (such as measurement of block), people naturally think of white light interference fringes as the positioning signal. With a photoelectric element to receive white interference fringe signal, through the circuit processing, remove the top of the zero interference fringes can be used as a positioning signal. It is easy to extract the vertices of the interference fringes without discrimination, but it is very difficult to identify which vertex signals correspond to the zero-order fringes from a set of vertex signals. We have done a great deal to this end.