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报道了在（３１１）Ａ腐蚀图形衬底上，用分子束外延（ＭＢＥ）生长高度规则的三种点状结构的实验研究．样品表面的原子力显微镜和剖面的扫描电子显微镜测试结果表明，在不同尺寸的方形凹面腐蚀图形区域，原凹面之间形成了沿［２３３］晶向不完全和完全收缩的尖角形点状外延结构；而在方形台面腐蚀图形区域，台顶面之间形成了沿［２３３］方向收缩的脊形点状结构．分析认为这些均匀有序的三角形点状结构的形成是由非平面（３１１）Ａ衬底上生长各向异性导致的必然结果，而构成这些点结构的晶面取向与原图形的取向相关．低温阴极荧光谱测试结果清晰地表明，在这些点状结构区域形成了短线状、环状、网状和点状发光．这是由于点状结构区域量子阱限制能量的横向变化所引起的．预期通过进一步减小图形尺寸，这种在（３１１）Ａ衬底上由于腐蚀图形而引入的表面形貌有序化生长现象，可以被用于三维量子限制结构的直接制备．
The experimental study of highly ordered three kinds of point structures grown by molecular beam epitaxy (MBE) on a (311) A etched substrate has been reported. Atomic force microscopy and cross-sectional scanning electron microscopy results of the sample surface show that there is a sharp point-like epitaxial structure with incomplete and complete shrinkage along the [233] crystal direction between the original concave and the concave area. Whereas in the area of the square countertop corrosion pattern, a ridge-like dot-like structure contracting in the [233] direction is formed between the mesa surfaces. It is considered that the formation of these uniformly ordered triangular dot structures is the inevitable result of the anisotropy of growth on the non-planar (311) A substrate, and the crystal orientation of the dot structures is related to the orientation of the original pattern. The results of cryogenic cathodic fluorescence spectrometry clearly show that streaks, rings, meshes, and spot-like luminescence are formed in these dot-like structures. This is due to lateral changes in quantum confinement energy in the point-like structure region. It is expected that by further reducing the pattern size, this phenomenon of ordered surface topography introduced on the (311) A substrate due to the erosion pattern can be used for the direct fabrication of three-dimensional quantum confinement structures.