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交流干涉仪也称锁相干涉仪,由于它的相干光路受到外界调制,输出信号就具有明显不同于普通干涉仪的交变多谐的特点。利用干涉仪的这种输出特性,在配置电子设备和微型机后,这类仪器可同时具有多种测量功能,而且测量范围大、速度快、精度高,对光学元件加工要求低(详见表一),因此成为近年来国外深受重视的精密测量仪器。下面我们结合近年来做过的一些工作对交流干涉仪的工作原理、定位精度分析及应用问题作一简单介绍。
Interferometry interferometer, also known as phase-locked interferometer, due to its coherent optical path by the outside world modulation, the output signal has a significantly different from the normal multi-harmonic interferometer characteristics. With the output characteristics of the interferometer, after the electronic equipment and the microcomputer are configured, such instruments can simultaneously have a variety of measurement functions, and the measurement range is large, the speed is high, the precision is high, and the processing requirements of the optical components are low (see the table Therefore, it has become a precision measuring instrument that has been highly valued by foreign countries in recent years. Below we have done some work in recent years on the exchange interferometer working principle, positioning accuracy analysis and application of a brief introduction.