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两维高速压电倾斜反射镜是自适应光学系统和提高跟瞄系统精度的关键器件。本文介绍了我们研制的各种倾斜镜的性能,对于大口径大角位移的倾斜镜,谐振频率将受到口径和角位移的限制,本文分析了这些限制,并提出提高谐振频率的措施。
Two-dimensional high-speed piezoelectric tilt mirrors are the key components for adaptive optics systems and for improving the accuracy of aiming and pointing systems. In this paper, the performance of various tilting mirrors we developed is introduced. For the large-angle and large-angle tilting mirrors, the resonance frequency will be limited by the aperture and the angular displacement. The paper analyzes the limitations and puts forward some measures to increase the resonance frequency.