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离子渗碳炉,是在真空加热室设置辉光放电机构,将微量C_3H_8气体导入升温至900℃以上的炉内,炉内压力保持在数百帕,将处理物做为阴极,附加数百伏直流电压于高压电极(阳极)的一种新渗碳炉。离子渗碳是气氛气体发生异常辉光放电而等离子化、碳离子冲击处理物表面渗入扩散的渗碳法。与真空渗碳比较,离子渗碳不仅压力相当低,而且由于是在辉光放电下进行渗碳,故还具有碳黑少的恃点。其原理如图
Ion carburizing furnace is set in the vacuum heating chamber glow discharge mechanism, the trace amount of C_3H_8 gas is introduced into a furnace heated to above 900 ℃, the furnace pressure was maintained at hundreds of Pa, the treated material as a cathode, add hundreds of volts A new carburizing furnace with DC voltage at the high voltage electrode (anode). Ion carburizing is abnormal gas glow discharge and plasma gasification, carbon ion impact treatment surface penetration diffusion carburizing method. Compared with the vacuum carburizing, ion carburizing not only the pressure is quite low, but also because of carburizing under glow discharge, it also has a less carbon black off. The principle shown in Figure