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采用Al-Ti镶嵌复合靶在Ar、N2和O2混合气体中反应溅射制备了一系列(Al,Ti)(O,N)涂层。并采用EDS、XRD、TEM和微力学探针研究了薄膜的化学成分、微结构和力学性能。结果表明,随氧分压的提高,涂层中氧含量逐步增加,氮含量相应减少,(Al+Ti)∶(O+N)的化学计量比仍约为1∶1,涂层保持与(Al,Ti)N涂层相同的NaCl结构。低氧含量时薄膜在(111)方向上择优生长,随着氧含量的提高,涂层生长的择优取向发生改变,高氧含量薄膜样品呈现强烈(200)织构的柱状晶。与此同时,(Al,Ti)(O,N)涂层的硬度和弹性模量也仍保持在与(Al,Ti)N涂层相当的35GPa和370~420GPa的高值。由于涂层中形成了相当含量的氧化物,这类涂层的抗氧化能力有望得到提高。
A series of (Al, Ti) (O, N) coatings were prepared by reactive sputtering in Ar, N2 and O2 mixed gas using Al-Ti inlaid composite target. The chemical composition, microstructure and mechanical properties of the films were studied by EDS, XRD, TEM and micromechanical probes. The results show that with the increase of partial pressure of oxygen, the content of oxygen in the coating gradually increases and the nitrogen content decreases correspondingly. The stoichiometric ratio of (Al + Ti): (O + N) is still about 1: Al, Ti) N coating the same NaCl structure. The film grows preferentially in the (111) direction at low oxygen content. With the increase of oxygen content, the preferential orientation of the coating growth changes. The sample with high oxygen content shows a strong (200) textured columnar crystal. At the same time, the hardness and elastic modulus of (Al, Ti) (O, N) coatings also remained at 35 GPa and 370-420 GPa, respectively, comparable to those of (Al, Ti) N coatings. Due to the formation of a considerable amount of oxide coating, such coatings is expected to improve the antioxidant capacity.