铁电溅射膜可能在集成光学领域内得到应用,尽管大多数波导作用元件以单品结构为基础。众所周知,多晶体或陶瓷材料有明显的电-光效应。溅射薄膜很容易制备,并可淀积在便宜的玻璃或石英基板上。遗憾的是由于晶体边界的散射,溅射薄膜的多晶性质会产生损耗。现在正在寻找减少这种损耗 Ferroelectric sputtering films may be used in the field of integrated optics, although most waveguide-active components are based on a single-piece structure. It is well known that polycrystalline or ceramic materials have significant electro-optic effects. Sputtered films are easy to prepare and can be deposited on inexpensive glass or quartz substrates. Unfortunately, the polycrystalline nature of the sputtered film causes losses due to the scattering of the crystal boundaries. Now looking to reduce this loss