一、引言为了建立新的电子标准系统,在电子技术实验室里完成了一项“基于量子效应的电子标准的研究”课题。这项研究工作要求有一个精密线圈。线圈是由镀金的铜丝在石英毂上绕制成的。带螺纹的石英毂的长度为1000毫米,直径为250毫米,螺纹的螺距精度要求在1μm以内。本会刊上一篇文章中曾介绍了石英毂上螺纹螺距误差的测量方法。这是在绕铜丝之前由一台激光干涉仪和两个电子比较仪测头组成的丝杠导程测量机上进行的。本文介绍一种利用作者研制的光学探头而 I. INTRODUCTION In order to establish a new electronic standard system, a project entitled “Research on Electronic Standards Based on Quantum Effect” was completed in the electronic technology laboratory. This research requires a precision coil. The coil is made of gold-plated copper wire wound around the quartz hub. A threaded quartz hub has a length of 1000 mm and a diameter of 250 mm. Thread pitch accuracy requirements are within 1 μm. An article in this journal introduced the method of measuring the thread pitch error on a quartz hub. This was done on a lead screw measuring machine consisting of a laser interferometer and two electronic comparator probes before the copper wire was wound. This article describes an optical probe developed using the author