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一、前言X 射线能量色散谱仪可将所分析的元素一次展谱,分析速度快、计数率高,在束流低到10~(11)安时仍有足够计数,X 射线无须聚焦,对试样高度不敏感,因此被广泛应用。在分析元素时,定量的准确度和精度是个关键问题。为了了解我所使用的 EDAX-711能谱仪定量分析的准确度和精度,我们用无标样定量和有标样定量方法对 EDAX-711能谱仪的准确度进行了测定,并对误差进行了初步分析。
I. INTRODUCTION X-ray energy dispersive spectrometer can display the analyzed elements once, with high analysis speed and high counting rate. When the beam current is as low as 10 ~ (11) A, there are still enough counts, the X-ray does not need to be focused, The sample is highly insensitive and is therefore widely used. Quantitative accuracy and precision are key issues when analyzing elements. To understand the accuracy and accuracy of the EDAX-711 spectrometer used in the quantitative analysis, we measured the accuracy of the EDAX-711 spectrometer with a non-standard and a standard sample and performed the error A preliminary analysis.