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对于在可变形非磁材料悬臂梁式板单表面粘贴可磁化材料薄膜所构成的磁场微传感器件结构 ,研究了其处在磁场环境中的磁弹性弯曲变形的磁场 力学特征 .为此 ,建立了由有限元方法分析磁场与有限差分法计算挠曲变形相结合来计算其结构在磁场中产生磁弹性变形的定量分析程序 .在此基础上 ,对于这一微传感结构的算例给出了其结构变形随外加磁场环境变化的磁场 挠度特征关系等定量结果 .结果表明 :微传感器件不仅可以测量出磁场的大小 ,而且给出了测量磁场矢量方向的可能性 .
For the structure of the magnetic field micro-sensor device formed by attaching a thin film of magnetizable material to a single surface of a deformable non-magnetic material cantilever plate, the magnetic field mechanical characteristics of the magneto-elastic bending deformation in a magnetic field environment are studied. For this purpose, The finite element analysis of the magnetic field is combined with the finite difference method to calculate the flexural deformation to calculate the structure of the magnetic elastic deformation in the quantitative analysis program.On this basis, for this micro-sensing structure is given The results show that the microsensor not only can measure the magnitude of the magnetic field, but also gives the possibility of measuring the vector direction of the magnetic field.