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基于衍射光线追迹和波前再现的方法,建立了薄膜衍射主镜基底面形误差所引起波前误差的物理仿真模型。并以边缘褶皱面形和中心向外凸出球面面形两种典型的薄膜基底形变类型为例,分别研究了两种面形误差对衍射主镜成像质量的影响,讨论了这两种典型薄膜形变所引起的主要像差类型,分析了衍射主镜波前均方根误差、面形峰谷值与光学系统斯特列尔比(SR)的相互关系,为进一步研究薄膜衍射主镜的装配夹持和像差补偿提供了理论支撑。
Based on the methods of diffraction ray tracing and wavefront reconstruction, a physical simulation model of the wavefront error caused by the base plane shape error of the primary diffraction lens was established. Taking the two types of typical film substrate deformation types as the edge fold surface and the center outward convex spherical surface as an example, the influence of two kinds of surface shape errors on the imaging quality of the primary diffraction mirror are studied respectively. The two typical films The main aberration types caused by the deformation are analyzed. The relationship between the root mean square error (RMS) of the primary mirror of the primary mirror, and the Stirling ratio (SR) of the optical system is analyzed. Clamping and aberration compensation provide theoretical support.