一、引 言 Zhp-2型火花源固体双聚焦质谱仪,是一种利用离子光学方法分析固体样品中微量杂质元素的大型仪器.它在物理学研究和应用工作中起着越来越重要的作用. 随着近代科学技术的发展,新材料的应用越来越广泛.对超纯物质的纯度提出越来越高的要求.如半导体材料中某些微量杂质 I. INTRODUCTION The Zhp-2 spark source solid-state dual-focusing mass spectrometer is a large-scale instrument that uses ion optics to analyze trace impurities in solid samples and plays an increasingly important role in the research and application of physics With the development of science and technology in modern times, the application of new materials is more and more extensive, and the purity of ultrapure materials is put forward higher and higher requirements, such as some trace impurities in semiconductor materials